Abstract

This article presents the thermal transport across solid-gas interface in micro/nano-channels in microelectronic devices and illustrates the nanoscale thermal resistance using thermal lattice Boltzmann method. The partial equilibrium between the gas molecules and phonons at the interface is implemented for the conjugate heat transfer simulation. The Boltzmann transport equation (BTE) is solved within both fluid and solid regions including the compressibility and rarefaction effects. The effects of thermal conductivity ratios and the temperature difference between plates on thermal resistance of interfaces are presented.